Spin coater Laurell WS-650Mz-23NPP
Device is for:
The device is intended for spin coating of thin films from solutions of polymers in organic solvents and other dispersions. The device is in corrosion-proof configuration. The maximum rotational speed is 12,000 RPM, the speed is controllable with 1 RPM increment.
The device is equipped with:
• software that allows full remote control of the spin coating process operation by a PC
• clear transparent lid with centre opening for dispensing of liquids. The lid has safety door lock which prevents chamber opening while program is running, or during chuck rotation after program ends, lid has safety door interlock which prevents rotation when lid or door is open.
• standard substrate vacuum chuck for wafers up to diameter 6" (~150 mm) and an adapter for holding pieces or fragments of the size from 10 mm to ~50 mm and other adapter for holding fragments of the size from 3 mm to ~15 mm, adapter for holding fragments of the size from 5 mm to ~25 mm.
• both manual and automatic liquid dispensers. One manual dispenser for three syringes, each of 5 mL volume. Two programmable (automatic) dispensers (for 5 mL syringes) with suck back without dropping and with precise micro-dispense capability down to 20 microliters.
contact person:
doc. Ing. et doc. Ing. Ivo Kuřitka, Ph.D. et Ph.D.
+420 57 603 8049 A418
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