Scanning electron microscope with autoemission cathode

Device is for:

Scanning electron microscope Nova NanoSEM 450 (FEI) with Schottky field emission electron source operated at acceleration voltage ranging from 200 V to 30 kV. Combination of advanced optics including Through-lens SED (TLD), Everhart-Thornley SED, Low-vacuum SED (LVD), Through-lens BSED (TLD-B), Lens-mounted Annular GAD, Retractable DBS Detector, Retractable STEM 3, Retractable Energy dispersive X-ray (EDX) detectors and imaging modes delivers best-in-class imaging and analytical performance. Observation in following modes is available:

• SEM – scanning electron microscopy using BSE a SE detectors, point resolution ≤ 1.0 nm at 15 kV, ≤ 1.4 nm at 1 kV, low vacuum mode ≤ 2 nm at 3 kV.

• STEM – scanning transmission electron microscopy, point resolution ≤ 0.8 nm at 30 kV, with detectors for bright field, dark field, and high angle dark field imaging (Z contrast)

• EDX – Energy dispersive X-ray spectrometry - TEAM EDS analysis system (EDAX) equipped with detector Octane plus (SDD, liquid nitrogen free), active area 30 mm2, Be window, Resolution at Mn Kα < 129 eV and EDAX TEAM software

The instrument contains active shielding against electromagnetic fields, cryogenic trapping system, plasma cleaning system for removal specimen contamination.