Elipsometer
Device is for:
- Scanning Spectroscopic Phase Modulated Ellipsometer Uvisel
2 (HORIBA) (PEM photoelastic modulator, 50 kHz) with automatic goniometer (35-90° with step 0.01° allowing Variable Angle Spectroscopic Ellipsometry) - The range of wavelengths: 180 – 2200 nm with the resolution better than 0.5 nm and automatic setting of the slits. The light source is Xenon lamp, 150 W
- Achromatic optics and imaging system. Fully automated sample stage with horizontal tilt setting
- Automatic Z-height adjustment: 40mm with Autofocus
- Computer controlled 200mm x 200mm XYZ stage for automated sample mapping
- Automated size selection of measuring spot, available for all degrees of light incidence
- Diameter of measuring size spots is ≤ 40um for 90°
- Measurement time is shorter than 5 min over the whole range 180-2200 nm with resolution 0.05 eV
- The ellipsometer allows thickness determination of transparent layers with thickness up to 40 um. Software DeltaPsi2
contact person:
doc. Ing. et doc. Ing. Ivo Kuřitka, Ph.D. et Ph.D.
+420 57 603 8049 A418
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research
